| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for transforming the position data of a defective IC memory into actual coordination. SOLUTION: A defect position input unit 3a reads out numerical data of positions from a defect position storing unit 1 for indicating the place of a defective memory element from a given original position in an IC memory. A condition input unit 3b reads the conversion condition for converting the position of the defect to real coordination. A converting unit 3c reads out defect position data and the converting condition to convert the defect position to real coordination. A real coordination data output unit 3d generates the real coordination converted from the position of the defect by a defect comparing unit 2. In this constitution, the electric defect position data at an IC memory obtained in a semiconductor IC tester, can be converted to the real coordination, and the defect position data can be compared with defect data of productive process.
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