| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a micromirror by which the degree of freedom of the selection of each part material is enhanced without causing high temperature heating, whose reliability is excellent and by which the reduction of a cost is attained. SOLUTION: This method has a process to form a sacrificing layer having an aperture part on a base plate 1, the formation process of a mirror base body to form the mirror body 4 connected with the base plate through the aperture part and having the formation surface of a reflection surface on the sacrificing layer by a particulate heaping method, and the process to form the reflection surface by forming a light reflection layer 6 on the formation surface of the reflection surface of a mirror base body and the process to remove the sacrificing layer, and the micromirror is formed of a very small mirror in which the connection part of the mirror base body 4 to the base plate 1 is made as a hinge part 5.
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