| 摘要 |
PROBLEM TO BE SOLVED: To realize a manufacturing method of a capacitor which increases a capacity of a capacitor without reducing reliability thereof. SOLUTION: The method has a step (A) for forming an interconnection line 26 in proximity to a substrate 24, a step (B) for forming a first dielectric layer 28 on the interconnection line 26, a step (C) for forming a first opening inside the first dielectric layer 28, a step (D) for forming a second opening consistent with the first opening inside the line 26, and a step (E) for forming a metallic plug 32 by filling the first and second openings with conductive metal. The metallic plug 32 has an anchor-like part and a main body in proximity to a lower part of the first dielectric layer 28. |
