LIGHT SOURCE AND WAVELENGTH STABILIZATION CONTROL METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, METHOD FOR PRODUCING EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD AND DEVICE

摘要

A light source (16) comprises a light producing unit (160) having a single wavelength producing light source (160A) and a light modulator (160c) for converting light from the light source to an optical pulse and outputting the optical pulse, an optical amplifying unit (161) having a group of optical fibers each provided with a fiber amplifier for amplifying the optical pulse from the light modulator, and a light intensity control unit (16c). The light intensity control unit (16c) controls stepwise the intensity of light outputted from each optical fiber by turning on/off the output separately and controls the intensity of light such as at least either the control of frequency of the optical pulse from the light modulator or the peak power thereof. Therefore it is possible to adjust minutely the intensity of light at each stage, in addition to the stepwise control of intensity of light, by controlling at least either the frequency of the optical pulse or the peak power thereof, thereby enabling the intensity of light to be controlled to any preset intensity if the intensity of light is in a predetermined range.