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发明名称
PLASMA TREATMENT METHOD AND DEVICE THEREOF
摘要
申请公布号
JPH11317370(A)
申请公布日期
1999.11.16
申请号
JP19980342346
申请日期
1998.11.16
申请人
TRUSI TECHNOL LLC
发明人
SINIAGUINE OLEG
分类号
H01L21/302;C23C16/458;C23C16/513;C23C16/54;H01L21/00;H01L21/205;H01L21/3065;H01L21/677;H01L21/687;H05H1/46;(IPC1-7):H01L21/205;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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