METHOD FOR PRODUCING ARTICLE HAVING PREDETERMINED SURFACE SHAPE, AND OPTICAL WAVEGUIDE ELEMENT

摘要

A method for producing an article having a predetermined finely concave-conv ex surface shape wherein a sol-gel material in the form of a film is arranged between a substrate and a mold and then is heated, to thereby form, on surfa ce of the substrate, a gelled film having a surface shape obtained by reversing the shape of the mold, characterized in that the sol-gel material comprises a dialkyldialkoxy(or dihalogeno)silane and/or a (substituted)aryltrialkoxy(or trihalogeno)silane, and a fluoroalkyltrialkoxy(or trihalogeno)silane. The method can be employed for producing an article having a predetermined shape which is excellent in thermal resistance, chemical resistance and dimensiona l accuracy, and thus an optical waveguide comprising an organopolysiloxane fil m having a core part and a clad part which is satisfying with respect to reliability and low loss in an optical communication band.