发明名称 TRANSPORTER AND SEMICONDUCTOR DEVICE MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To accurately grasp the temperature of objects carried on trays with a simple constitution. SOLUTION: A transporter transports objects by moving a plurality of trays carrying the objects along a prescribed carrying path. A temperature detecting element 22 and a sliding electrode 23 are provided in each tray 14 and fixed electrodes 24 are provided at prescribed output fetching positions of a rail 21. By means of an output fetching mechanism composed of the sliding electrodes 23 and fixed electrodes 24, the outputs of the temperature detecting elements 22 are fetched. Therefore, the temperatures of the objects carried on the trays 14 can be measured and, in addition, the output fetching mechanism can be used commonly to the temperature detecting elements 22. Thus the temperatures of the objects carried on the trays 14 can be grasped accurately with a simple constitution.
申请公布号 JP2001077034(A) 申请公布日期 2001.03.23
申请号 JP19990250499 申请日期 1999.09.03
申请人 SHARP CORP 发明人 SUNAKAWA YOSHIYUKI
分类号 H01L21/677;B65G49/07;C23C16/54;H01L21/205;H01L21/68;(IPC1-7):H01L21/205 主分类号 H01L21/677
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