发明名称 THERMAL SENSOR AND METHOD OF MAKING SAME
摘要 <p>A two level microbridge infrared thermal detector having an upper detector planar section (a) comprising a temperature responsive detector of an oxide of vanadium having a high TCR and a resistivity in the range of 20K ohms to 50K ohms per square sheet resistance, and (b) being supporter above a lower section by leg portions of an oxide of vanadium having a resistivity of approximately 500 ohms per square sheet resistance.</p>
申请公布号 WO2001020280(A1) 申请公布日期 2001.03.22
申请号 US2000024957 申请日期 2000.09.13
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