| 摘要 |
<p>A method for producing an article having a predetermined finely concave-convex surface shape wherein a sol-gel material in the form of a film is arranged between a substrate and a mold and then is heated, to thereby form, on surface of the substrate, a gelled film having a surface shape obtained by reversing the shape of the mold, characterized in that the sol-gel material comprises a dialkyldialkoxy(or dihalogeno)silane and/or a (substituted)aryltrialkoxy(or trihalogeno)silane, and a fluoroalkyltrialkoxy(or trihalogeno)silane. The method can be employed for producing an article having a predetermined shape which is excellent in thermal resistance, chemical resistance and dimensional accuracy, and thus an optical waveguide comprising an organopolysiloxane film having a core part and a clad part which is satisfying with respect to reliability and low loss in an optical communication band.</p> |
