发明名称 PUMPING EQUIPMENT HAVING AUTOMATIC PRESSURE CONTROL VALVE
摘要 PURPOSE: A pumping equipment having an automatic pressure control valve is provided to control the pressure of each reaction chamber, respectively by using a pump connected to a multitude of reaction chambers. CONSTITUTION: A pumping equipment having an automatic pressure control valve relates to a pumping equipment for connecting a plurality of vacuum line(42,44). The pumping equipment comprises a multitude of reaction chambers and an automatic pressure control valve. A pump(40) is connected to the multitude of reaction chambers. Many vacuum lines are disposed to connect the reaction chambers and the pump. The automatic pressure control valve is disposed to each vacuum line. The automatic pressure control valve is disposed at a front portion of the vacuum line connected to the pump.
申请公布号 KR20000025471(A) 申请公布日期 2000.05.06
申请号 KR19980042567 申请日期 1998.10.12
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JONG GEOL
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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