NANO-DRIVE FOR HIGH RESOLUTION POSITIONING AND FOR POSITIONING OF A MULTI-POINT PROBE

摘要

A multi-point probe, a method for producing the multi-point probe and a cylindrical nano-drive for in particular driving the multi-point probe in a multi-point testing apparatus for testing electric properties on a specific location of a test sample. The multi-point probe comprises a supporting body defining a first surface, a first multitude of conductive probe arms each of the conductive probe arms defining a proximal end and a distal end being positioned in co-planar relationship with the first surface of the supportin g body. The conductive probe arms are connected to the supporting body at the proximal ends thereof and have the distal ends freely extending from the supporting body, giving individually flexible motion to the first multitude of conductive probe arms. The conducting probe arms originate from a process of producing the multi-point probe including producing the conductive probe arm s on a supporting wafer body in facial contact with the supporting wafer body and removal of a part of the wafer body providing the supporting body and providing the conductive probe arms freely extending from the supporting bod y. The multi-point probe further comprises a third multitude of conductive tip elements extending from the distal end of the first multitude of conductive probe arms. The conductive tip elements originate from a process of metallization of electron beam depositions on the first multitude of conductive probe arms at the distal ends thereof.