| 摘要 |
PURPOSE: An emergency cut-off device of automatic provider is provided to cut off automatic provider of KLA 5xxx device, selectively cuts off automatic provider without cutting off the whole equipments in emergency state, and ensures a wafer security. CONSTITUTION: An emergency cut-off device includes a switch. In a transistor, in a transistor (2), a base electrode is connected to a first power via the switch. In relay(3), one terminal of excitation coil is connected to a collector electrode of the transistor, another terminal of the excitation coil(3a) is connected to a second power. Automatic provider is cut off by the relay. Thereby, emergency cut-off device of automatic provider selectively cuts off automatic provider without cutting off the whole equipments in emergency state, and ensures a wafer security.
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