| 摘要 |
A vacuum processing device, comprising a driven body (122) disposed inside a vacuum processing chamber (104), drive means (126) disposed outside the vacuum processing chamber (104), and a drive shaft (124) connecting the driven body (122) to the drive means (126), wherein a first annular body (152) is fixed to the drive shaft (124) and a second annular body (150) is rotatably pivoted on the first annular body (152), and a bellows (148) tightly sealing the surrounding of the drive shaft (126) is disposed so as to connect the second annular body (150) to the inner wall of the vacuum processing chamber (104), whereby, in moving up and down operations, the bellows (148) is operated according to the rotation of the drive shaft (124), but remains unoperated in the rotating operation, and thus the moving up and down and rotatingly operating drive shaft can be sealed satisfactorily by the bellows. |
