DUAL DIAPHRAGM PUMP

摘要

A diaphragm pump has first and second diaphragms each having a set of valve holes (the two sets being non-aligned) in the diaphragm surface thereof, one inlet port and one outlet port. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the two diaphragms independently to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump.