SPIN COATING METHOD AND SPIN COATER

摘要

PROBLEM TO BE SOLVED: To provide a spin coating method and spin coater by which a coating film uniform in thickness is formed over the whole surface on the principal panel of a substrate without scaling up the coater. SOLUTION: In the coater, a substrate G with a protrusion 7 formed on a resist film 6 in a first spin coating stage is rotated on the axis of rotation CC by a motor 3 while being held almost horizontally by a spin chuck 1 so that the axis CC pierces a second position P2 on the substrate G different from a first position P1 where the protrusion 7 is formed.