| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a fixed sheet resistance value without causing a foreign matter and a defect in a film by coating a tin oxide film formed on a substrate with a coating agent containing one kind of ion selected from Li+, Na+ and K+ and heat-treating the coated substrate to raise the sheet resistance value. SOLUTION: A tin oxide film 2 is formed through a barrier film 3 (SiCxOy film) on a substrate 4 (soda-lime glass, etc.), and is coated with a coating agent 1 (preferably an aqueous solution of NaOH) containing one kind of ion selected from Li+, Na+ and K+ in about 10 nm to 10μm thickness. Then the coated substrate is heat-treated at about 100-1,000 deg.C, preferably <= about 800 deg.C and the monovalent ion is difftused into the tin oxide film so that a free electron carrier existing in the tin oxide film is trapped, the concentration of the free electron carrier is reduced to raise the sheet resistance value of the tin oxide film to about 10-100ω/square..Consequently a tin oxide film of various kinds of qualities is obtained in excellent productivity.</p> |
