SF6 GAS RECOVERING APPARATUS

摘要

PROBLEM TO BE SOLVED: To recover almost all of SF6 gas without venting the same to the atmosphere by separating the SF6 gas in a container to be recovered from mixed gas. SOLUTION: The SF6 gas in a container to be recovered is separated from mixed gas containing atmospheric components in a pressurization part or a PSA type gas separation part to discharge the gas other than the SF6 gas to the atmosphere and only the SF6 gas is taken out to be cooled and liquefied to recover the SF6 gas. The cycle time of the gas separation part is controlled on the basis of the measured concn. value of the SF6 gas.