| 摘要 |
PROBLEM TO BE SOLVED: To prevent electrolytic corrosion between an Al layer and an ITO layer by using an Al alloy as a protective layer and to prevent the occurrence of electrolytic corrosion when the Al and Al alloy come in contact with a developer. SOLUTION: An ITO layer and a metallic layer are separately patterned to form source electrodes 26 (ITO layer) and 27 (metallic layer) and drain electrodes 28 (ITO layer) and 29 (metallic layer) as well as connection terminal electrodes. A photosensitive resin is ten applied, exposed, developed and heat- treated to form a resin layer 30 having plural projecting and recessing parts 31. A protective layer 11 for preventing electrolytic corrosion between an Al layer and the ITO layer is formed, e.g. by sputtering using an Al-W alloy and the Al layer 4 for forming a reflection electrode is formed by sputtering. An etching mask for patterning the Al layer 4 and the protective layer 11 is further formed using a resist and the layers 4 and 11 are patterned. |
