发明名称 DEVICE AND METHOD FOR GENERATING SIMULATION DATA
摘要 PROBLEM TO BE SOLVED: To easily set conditioning concerning production dispersion and to automatically generate simulation data for each condition. SOLUTION: This device is provided with a mask data input/management module 2 for managing mask data for forming a wiring pattern, and reading these mask data corresponding to the selection of a user U, a process conditioning setting module 4 for setting conditioning concerning the production dispersion of the wiring pattern corresponding to the designation of the user U, and a mask data converting module 5 for generating the simulation data on the basis of the mask data read by the mask data input/management module 2 and the condition set by the process conditioning setting module 4.
申请公布号 JP2000285147(A) 申请公布日期 2000.10.13
申请号 JP19990087518 申请日期 1999.03.30
申请人 SONY CORP 发明人 TATSUMI TAKAAKI
分类号 H01L21/82;G06F17/50;H01L21/66;(IPC1-7):G06F17/50 主分类号 H01L21/82
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