| 摘要 |
<p>PROBLEM TO BE SOLVED: To control a minute optical element, a fill-factor without excess recession on a substrate, up to about 100% by melting part of the surface of a material on a substrate stored in a housing by heating it locally and evacuating gas evaporated from the housing. SOLUTION: A driving mechanism of a single shaft (when an optical axis ranging from a mirror 102 to a substrate 109 is made Z axis, Y direction) is installed in a laser 101, a driving mechanism of two shafts (X direction and Y direction) is installed in a mirror cylinder 112 with a mirror 102 - a rectile 106 set, and the driving mechanisms are controlled precisely. Part of the surface of a material on the substrate 109 is heated locally by laser beams, the heated part is melted, evaporated, and evacuated to form a curved surface on the substrate. The substrate 109 is mounted on a support 110 in a treatment chamber 108, and when laser beams L are incident through the cylinder 112, a resin irradiated with the beams L is melted and raised.</p> |
