| 摘要 |
Micromirror device, and optical pick-up using the same, in which a precise tracking of a data pitch of a high density optical recording device is made by making a fine variation of a laser beam using a micromirror fabricated by micromachining technology and the silicon batch fabrication process, and particularly, a piezoelectric actuator is used for making a parallel movement of the micromirror for substantially linear control of a position of a beam compared to a tilting type mirror drive in the related art. <IMAGE> |
