| 摘要 |
PROBLEM TO BE SOLVED: To quickly detect liquid leakage and to prevent a trouble beforehand by attaching a liquid leakage sensor to a buffer tank or a pipeline connected to the vacuum side of a membrane degassing apparatus using a gas permeable film for removing a dissolved gas from a liquid to be applied. SOLUTION: A tank 10 storing a coating liquid is connected with a membrane degassing apparatus 20 through a liquid sending pump 11 and a degassing membrane 22 of a gas pertneable film is installed in the inside. A buffer tank 30 is connected with the vacuum side of the membrane degassing apparatus 20 and a vacuum pump 40 is connected to the buffer tank. On the other hand, the liquid outlet side of the membrane degassing apparatus 20 is joined to a coating apparatus 60 through a filtration apparatus 50. In this case, a liquid leakage sensor 31 is attached to the inside of the buffer tank 30. Consequently, at the time when the coating liquid leaks owing to break of the degassing membrane 22, the coating liquid is led down to the bottom part of the buffer tank 30 and quickly detected by the liquid leakage sensor 31 to prevent a trouble beforehand.
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