| 摘要 |
<p>A vacuum pump comprising a shaft (2) rotatable by means of a motor (3), at least two spaced pump stages (6,7) mounted on the shaft (2), a first pump inlet (11) through which gas can pass for passage through all the pump stages for evacuating a first system (20) and a second pump inlet (14) through which gas can enter the pump at an inter-stage location (8) for passage through only subsequent stages of the pump for evacuating a second system (22), said first and second systems (20,22) each having a gas outlet flange for attachment to a first or a second pump inlet, in which the vacuum pump is mounted relative to the respective first and second systems (20,22) such that the longitudinal axis of the shaft (2) is inclined to each of the gas outlet flanges. <IMAGE></p> |
