| 摘要 |
An acceleration sensor element comprises a weight; a support having a hollow part, which is disposed around the weight as a center; and a flexible plate having piezoelectric elements in which a piezoelectric body is sandwiched by at least one set of electrodes, which is disposed horizontally across the support to suspend the weight at the hollow part of the support, wherein the acceleration applied from the exterior is converted to the deflection of the flexible plate based on the movement of the weight arising corresponding to the acceleration, and the direction and the rate of the acceleration are three-dimensionally detected by electric charges generated in the piezoelectric body corresponding to the deflection of the flexible plate. The piezoelectric elements are disposed only at flexible parts of the flexible plate. An acceleration-sensor-element manufacturing method comprises a first step of laminating and compression bonding a fault-shaped green sheet of the weight, the support, and the flexible plate to form a laminated layer, a second step of integrally sintering the laminated layer to form a sintered body, and a third step of forming the piezoelectric elements by a thick-film method and sintering them. <IMAGE> <IMAGE> |
