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发明名称
CHEMICAL MECHANICAL ABRASIVE COMPOSITION FOR USE IN SEMICONDUCTOR PROCESSING
摘要
申请公布号
SG79296(A1)
申请公布日期
2001.03.20
申请号
SG19990006337
申请日期
1999.12.10
申请人
ETERNAL CHEMICAL CO., LTD
发明人
LEE TSUNG HO;LEE KANG-HUA;YEH TSUI-PING
分类号
C09G1/02;C09K3/14;(IPC1-7):C09G1/02
主分类号
C09G1/02
代理机构
代理人
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地址
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