发明名称 Device for chemically etching a fiber probe
摘要 A two-phase etching system having an etchant solution and an overlayer of a protective solvent. The physical properties of the etchant solution and the protective solvent are matched to form a flat meniscus on the top surface of the etchant solution around a fiber immersed in the protective solvent and the etchant solution. Convective flows within the etchant solution are maintained in order to form a smooth and sharp fiber probe with a small tip apex.
申请公布号 US6203660(B1) 申请公布日期 2001.03.20
申请号 US19990375245 申请日期 1999.08.16
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 UNGER MARC A.;KOSSAKOVSKI DMITRI A.
分类号 C03C25/68;G01Q60/22;G02B6/24;G02B6/245;(IPC1-7):C23F1/02 主分类号 C03C25/68
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