| 摘要 |
PURPOSE: An alarm device of semiconductor fabricating equipment is provided to check easily a current state of semiconductor fabricating equipment by using a lamp tower. CONSTITUTION: An input portion receives four input signals(A,B,C,D). A logic combination portion(10) has a combination portion(34). The combination portion(34) receives input signals(A1,B2,C1,D1) of non-inverted states or input signals(A2,B2,C2,D2) of inverted state. The input signals(A2,B2,C2,D2) of inverted state are inverted by a multitude of inverter(26,28,30,32). Each output signal of the combination portion(34) is outputted to three drive portions(12,14,16) corresponding to each output terminals(Q1,Q2,Q3). The drive portions(12,14,16) outputs drive signals for driving three lamps(18,20,22) to a lamp tower(24). The lamp tower(24) includes the lamps(18,20,22).
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