发明名称 |
Reduced diffusion of a mobile specie from a metal oxide ceramic into the substrate |
摘要 |
A scavenger layer is provided to prevent the diffusion of an excess mobile specie from a metal oxide ceramic into unwanted parts of a device. The scavenger layer is provided above the metal oxide ceramic. As the excess mobile specie diffuses out of the metal oxide ceramic, it migrates toward the scavenger layer and reacts with it. The reaction consumes the excess mobile specie.
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申请公布号 |
US6204158(B1) |
申请公布日期 |
2001.03.20 |
申请号 |
US19980216371 |
申请日期 |
1998.12.18 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC.;INFINEON TECHNOLOGIES NORTH AMERICA CORP. |
发明人 |
HENDRIX BRYAN C.;HINTERMAIER FRANK S.;ROEDER JEFFREY F.;BAUM THOMAS H.;DESROCHERS DEBRA A. |
分类号 |
H01L21/3205;H01L21/02;H01L21/314;H01L21/316;H01L21/822;H01L21/8246;H01L27/04;H01L27/105;H01L27/115;(IPC1-7):H01L21/38 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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