| 摘要 |
A method for fabricating a semiconductor device includes the steps of forming a field oxide layer on a field region of a semiconductor substrate where a field region and an active region are defined, forming a polycide layer on the entire surface of the semiconductor substrate including the field oxide layer and selectively removing the polycide layer to form a gate electrode and a lower electrode of a capacitor, successively forming a dielectric layer and a polysilicon layer on the entire surface including the lower electrode of the capacitor and patterning the dielectric layer and the lower electrode to form an upper electrode pattern and a resistor pattern, and forming an insulating layer to cover the resistor pattern and forming another polycide layer on the upper electrode of the capacitor.
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