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发明名称
摘要
申请公布号	JP3277550(B2)	申请公布日期	2002.04.22
申请号	JP19920128850	申请日期	1992.05.21
申请人		发明人
分类号	F24F7/06;B01L1/04;B01L5/00;B65G49/00;H01L21/677;(IPC1-7):H01L21/68	主分类号	F24F7/06
代理机构		代理人
主权项
地址

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