| 摘要 |
PURPOSE: To provide a substrate transfer device which is capable of previously detecting abnormalities even if substrates are housed in a magazine as vertically separated from each other. CONSTITUTION: A substrate transfer device is equipped with a magazine l which holds substrates 2, an unloading table 3 which takes out the substrate 2 housed in the magazine 1 making its upside bear against the underside of the substrate 2, a T table 4 and a Z table 5 which move the unloading table 3, and a contact 7 which is provided to the unloading table 3 and comes into contact, with the substrate 2, wherein the contact 7 is supported in such a manner that it is set three-dimensionally displaceable to the unloading table 3, and a sensor 12 which detects the displacement of the unloading table 3 is provided. |
