发明名称 DISCHARGE DEVICE FOR PHOTOSENSITIVE COLORING RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To suppress increase in viscosity due to lapse of time of a photosensitive coloring resin composition and to suppress the generation of flocculated matter by providing the device with a circulating flow passage for the photosensitive coloring resin composition branched from a discharge flow passage for the photosensitive coloring resin composition. SOLUTION: A booster pump 19 does not operate and the liquid surface of the photosensitive coloring resin composition 17 in a tank 11 is held unpressurized, during the standby after the end of the discharge of the photosensitive coloring resin composition 17 until the next discharge is started. A circulating pump 33 of the circulating flow passage 30 operates in this state, and the photosensitive coloring resin composition 17 in a tank 11 returns into the tank 11 via a tube 12 of the discharge flow passage 40, a tube 32 of a circulating flow passage 30 and a tube 34 of the circulating pump 33 and the circulating flow passage 30. When the photosensitive coloring resin composition 17 is discharged in this manner, the photosensitive coloring resin composition 17 is dropped onto a substrate 16 via the discharge flow passage 40 and during standby, the photosensitive coloring resin composition 17 circulates in the circulating flow passage 30 and the tank 11, without the photosensitive coloring resin composition 17 flowing into the discharge flow passage 40.
申请公布号 JP2001066784(A) 申请公布日期 2001.03.16
申请号 JP19990237474 申请日期 1999.08.24
申请人 TOPPAN PRINTING CO LTD 发明人 YAMADA KATSUMOTO
分类号 H01L21/027;G03F7/004;G03F7/16 主分类号 H01L21/027
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