| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an ultrasonic transducer having high yield, high assembling accuracy, high reliability and high image quality. SOLUTION: This manufacturing method is for an ultrasonic transducer 100 provided with a plurality of piezoelectric rods 3 arranged with a gap along with a curved face, an acoustically matching layer 6 on one side face of each piezoelectric body, and a rear load member on the other side face, and includes a step (a) where a silicon block 1 is etched to form a plurality of holes 2 arranged along with a prescribed curved face, a step (b) where a piezoelectric material is packed in each hole, dried, baked to form a piezoelectric rod, a step (c) where each piezoelectric body is etched to expose one side face to form an acoustically matching layer to the side face, a step (d) where each piezoelectric body is etched to expose the other side face to form a rear load member to the other side face, and a step (e) where a block is etched to form a gap between the piezoelectric bodies. |
