PRODUCTION OF MAGNETO-RESISTIVE ELEMENT

摘要

PROBLEM TO BE SOLVED: To easily align the magnetization of a fixed layer by forming a magnetic layer (fixed layer) which is not easily magnetized and rotated by an external magnetic field and a magneto-resistive(MR) element composed of a magnetization rotation suppression layer, holding both at a specific temperature range and impressing the magnetic field of a specific range thereto. SOLUTION: The directions of easy magnetization of the fixed layer 3 and a free layer 5 are intersected orthogonally with each other and are so arranged that the direction of the signal magnetic field to be detected is made parallel or counter parallel to the magnetization direction of the fixed layer. The control of the easy axes is first executed by the magnetic field impression to a substrate during desosition. The magnitude of the magnetic field is specified to at least >=10 Oe and to <=200 Oe as an upper limit. Also, the heat treatment temperature is specified to >=200 to <=300 deg.C. The magnetic field impression direction of this time is made parallel to the direction of the magnetization of the fixed layer 3 like an arrow H. The control of the magnetization direction of the fixed layer by the heat treatment using such weak magnetic field is particularly effective when the magnetization rotation suppression layer of a relatively low bias effect is used.