| 摘要 |
PROBLEM TO BE SOLVED: To reduce noises caused by a capacitance current and affecting test and measurement to a value less than an allowable value by shielding the capacitance current produced by a thermal unit for changing the temperature of a chuck for supporting a device, in a probe station for testing and measuring an integrated circuit device. SOLUTION: This thermal chuck includes a chuck 4 for supporting a device during testing, a thermal unit for changing the temperature of the chuck 4, and a conductive member which is connected to the thermal unit as a capacitance but is not in direct electrical contact therewith. The conductive member is connected electrically to a controller 18 for supplying electricity to the thermal unit and provides a conductive passage for taking almost all the capacitance current generated by the operation of the thermal unit and flowing the current to the controller 18. In order to take the capacitance current generated by the conductive member and to flow the current to a ground outside the closed box 2, the expansion portion of the environment closed box 2 of the probe station is coupled capacitatively to the conductive member.
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