| 摘要 |
PROBLEM TO BE SOLVED: To prevent short circuits, without causing upset of the centers of a filament and a cathode by keeping the filament at a desired position in the cathode with a support member, when the hold of a filament support assembly for the filament is loosened during the operation of an ion source. SOLUTION: A support member 1210 keeps the filament 178 at a desired position in a cathode 124 during the operation of an ion source 1200, even in a situation that the hold of clamps 174a, 174b and arms 170a, 170b to a tantalum leg part is loosened. Thereby, since the filament 178 operates in a slot of the support member 1210, short circuits between the filament 178 and the cathode 124 are prevented. Preferably, the ion source additionally has first and second conductive leg parts supporting the end parts of the filament, the filament is made of tungsten, the first and second conductive leg parts are formed of tantalum, and a filament support assembly is made of molybdenum.
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