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发明名称
Menetelmä metallinitriodiohutkalvojen valmistamiseksi
摘要
申请公布号
FI20010539(A0)
申请公布日期
2001.03.16
申请号
FI20010000539
申请日期
2001.03.16
申请人
ASM MICROCHEMISTRY OY,
发明人
LESKELAE,MARKKU;RITALA,MIKKO KALERVO;ALEN,PETRA;JUPPO,MARIKA
分类号
C23C16/34;C23C16/44;C23C16/455;H01L21/285;(IPC1-7):B05D/
主分类号
C23C16/34
代理机构
代理人
主权项
地址
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