发明名称 MAGNETIC SENSOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an output with a large variability of voltage without bias component with a simple circuit configuration, by forming a first magnetic sensitive section having a large magnetoresistance effect and a second magnetic sensitive section having a small magnetoresistance effect on a semiconductor substrate made of the same material. SOLUTION: Shunt electrodes 3 are arranged at a prescribed interval with L/W of a magnetic sensitivity unit 2a set to a small value, whereby a first magnetic sensitive section 5 having a large magnetoresistance effect is formed. A second magnetic sensitive section is formed by forming an InSb magnetic sensitive layer 2 having a prescribed width on a semiconductor substrate 1 by vacuum evaporation and photolithographic processes, and by connecting input/output electrodes 4 made of Au to both ends of the layer 2 in ohmic junction. Since the unit 2b is formed by interposing the InSb layer 2 with high electron mobility between the electrodes 4a and 4b, its magnetoresistance effect can be made small.
申请公布号 JP2001068756(A) 申请公布日期 2001.03.16
申请号 JP19990237198 申请日期 1999.08.24
申请人 HITACHI CABLE LTD 发明人 SATO HIDEKI;WAJIMA MINEO;TANAKA TAKESHI
分类号 H01L43/08;G01R33/09;(IPC1-7):H01L43/08 主分类号 H01L43/08
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