| 摘要 |
PROBLEM TO BE SOLVED: To high-accurately perform alignment at angles of respective base plates. SOLUTION: This position detecting mark 1, which is used in common at each rotating position and whose position is detected, is used in order to perform alignment at each rotating position of the base plate, when the image of rotation symmetry is formed on the base plate by the successive exposure of the same pattern, while the base plate is rotated at a prescribed angle. The position detecting mark of the symmetry and a polygon whose angle number is a multiple of 2 are applicable as such a position detecting mark.
|
