| 摘要 |
PROBLEM TO BE SOLVED: To stably feed liquid raw material stored under atmospheric pressure into a device such as a pressurized reactor while preventing fluctuation in flow rate caused by attachment in a valve and abrasion of a valve element, even in a case where a feed rate of the raw material is extremely low. SOLUTION: After filling cylinders with liquid raw material stored in a raw material tank 1 under atmospheric pressure, the raw material in a raw material returning line 35 is pushed out to the raw material tank 1 by means of pressurizing gas, and then the pressurizing gas is filled in the cylinders to press the raw material. On completing pressurizing, the cylinders communicate with the reactor 3 and then the pressurizing gas is fed into the cylinders, so that the pressurized material is pushed out from the cylinders to the reactor 3 in a volume flow comparable to a pressurizing gas flow rate. The remaining material in the cylinders is fed out to the raw material tank 1 by means of the pressurizing gas. These operations are repeated in order for a plural system of cylinders 30A, 30B to continuously feed the raw material in the reactor 3.
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