发明名称 PRODUCTION OF THIN FILM MAGNETIC HEAD
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic head by which an ABS side end face of a second yoke part can be formed so as to have excellent perpendicularity when a second pole part and the second yoke part are formed by different processes. SOLUTION: When the second pole part 220 and the second yoke part 221 are formed by different processes, a plating base film M1 is formed on an exposed surface after a first magnetic film 21, a gap film 24, a coil film 23, an insulating film 25 and the second pole part 220 are formed. Then a negative resist film is applied on a surface of the plating base film M1. Then a resist frame defining a pattern for the second yoke part 221 is formed by exposing and developing the negative resist film. Thereafter plating for the second yoke part 221 is executed.
申请公布号 JP2001067614(A) 申请公布日期 2001.03.16
申请号 JP19990242282 申请日期 1999.08.27
申请人 TDK CORP 发明人 UEJIMA SATOSHI;HOKUSHIN JUNICHI;TAJIMA JIICHI
分类号 G11B5/31;G11B5/39;(IPC1-7):G11B5/31 主分类号 G11B5/31
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