发明名称 BASE PLATE FOR FORMING TRANSPARENT CONDUCTIVE FILM
摘要 PROBLEM TO BE SOLVED: To uniformize a thickness of a material film formed on a transparent conductive film by internally embedding a film of a dielectric formed on a transparent base plate by a prescribed pattern such as a stripe, and forming the transparent conductive film in a flat shape on the transparent base plate so as to form a thin film on the film of the dielectric. SOLUTION: A film 2 of a dielectric of MgO formed on a transparent base plate 1 of alkali-free glass is formed in such a way that a photoresist is applied on the transparent base plate 1, a prescribed pattern is formed by applying a prescribed photolithoprocess to this, and afterwards, a pyrolizing method raw material of MgO is applied to this, and after drying, a remaining resist is removed, and sintering is applied. A transparent conductive film 3 is formed by being heated and sintered by applying a pyrolizing method raw material of ITO. Thus, a thin film 4 is formed on the film 2 of the dielectric. Thus, since the film 2 of the dielectric is embedded inside, the transparent conductive film 3 presents a flat surface state.
申请公布号 JP2001067937(A) 申请公布日期 2001.03.16
申请号 JP19990237199 申请日期 1999.08.24
申请人 HITACHI CABLE LTD 发明人 UNNO TSUNEHIRO
分类号 B60S1/02;B32B7/02;G02F1/1343;H01B5/14;H01B13/00;H01L51/50;H05B33/12;H05B33/14;H05B33/26;H05B33/28;(IPC1-7):H01B5/14 主分类号 B60S1/02
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