| 摘要 |
PROBLEM TO BE SOLVED: To efficiently disperse the distribution of an interference peak by projecting a standing wave on the surface of an object, for diagonal scanning to the width wise direction of linear beam. SOLUTION: The distribution of interference fringe in a linear laser beam can be shaped into a sine wave form for effective function if the number of lenses constituting a cylindrical lenses 202 is odd. The uneven energy, however, still exists due to optical interference in the linear laser beam. The uneveness can be exaggerated depending on the irradiation condition of laser beam. In this case, the scanning direction of the laser beam may be fine tuned for improvement. Fine tuning is performed by allowing the linear laser beam to scan in the direction deflected, while orthogonal to the line direction of the beam, by an angle (y) from the direction, in a plane, containing the plane formed by the linear laser beam, for laser process.
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