| 摘要 |
PROBLEM TO BE SOLVED: To prevent the surface of an object which is to be washed from being oxidized during washing by providing an ultra pure water supply line for supplying an ultra pure water to a washing bath and water channel with a film degassing element. SOLUTION: A diluted hydrofluoric acid bath 2, water channels 3, 5, and 7, an ammonium hydrogen peroxide water-solution bath 4, and a hydrochloric acid hydrogen peroxide water-solution bath 6 are provided in sequence, and an ultra pure-water line 1 supplies ultra pure-water to them. Here, a film degassing module 13 is provided before a stage where the ultra pure-water line 1 injects ultra pure-water into each bath. The film degassing module 13 provides the ultra pure-water line 1 which is to be processed to one chamber among those separated by a gas separating film permeable of gas while providing a trace amount of nitrogen gas to the other chamber on a secondary side during decompression, so that the gas contained in the ultra pure water line 1 is moved and removed to the other chamber through the gas separating film, for degassing. Generally, the hydrophobic polymer film to tetrafluoroethylene, and silicon rubber, etc., is formed into a hollow yarn film, etc., which is used as the gas separating film.
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