METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE THEREOF, AND GYROSCOPE

摘要

PURPOSE: A method for manufacturing a semiconductor device, a semiconductor device thereof, and a gyroscope are provided to form easily an electrode on an upper face of a fine projection portion. CONSTITUTION: A semiconductor member having a projection region(102) on a substrate(100) is prepared. An upper face of the substrate(100), an upper face(101) of the projection region(102), a side face of the projection region(102) is buried by performing a spin-coating process using a potting material(104). The upper face(101) of the projection region(102) is exposed. An electrode material is coated on the upper face(101) of the projection region(102). The potting material(104) is removed.