发明名称 CLEAN ROOM AND METHOD
摘要 A clean room which avoids the problems attendant with the raised floor found in prior art clean rooms uses a perforated floor upon which equipment can be directly placed. The perforated floor includes a regular array of openings through which air can pass to an underlying facility room. The openings are covered by a grate through which the air can pass. In combination the perforated floor and the grates are able to support equipment in any location thereon.
申请公布号 WO0118323(A1) 申请公布日期 2001.03.15
申请号 WO2000US21490 申请日期 2000.08.07
申请人 SPEEDFAM-IPEC CORPORATION;RAPISARDA, JOSEPH;COLLEY, TIMOTHY 发明人 RAPISARDA, JOSEPH;COLLEY, TIMOTHY
分类号 E04B5/43;E04B5/48;E04B9/02;E04F15/02;E04F15/024;E04H5/02;F24F3/16;F24F7/06;F24F7/10 主分类号 E04B5/43
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