| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer film reflecting mirror having high reflectivity and low wavelength resolution particularly for a wavelength near 60Åin a soft X-ray region. SOLUTION: The multilayer film reflecting mirror comprises first layers 3 each made of a substance having a small difference between a refractive index in a soft X-ray region and a vacuum refractive index, and second layers 2 each made of a substance having a large difference between the index in the soft X-ray region and the vacuum index. The layers 3 and 2 are alternately laminated on a base plate 1 to form a multilayer film, as the substance having the large difference in refractive indexes, a substance having at least a copper, nickel, cobalt, manganese and chromium is used, and as the substance having the small difference, a substance having at least a carbon is used.
|
