APPARATUS FOR FIXING QUARTZ CAP OF VERTICAL DIFFUSION FURNACE FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for fixing a quartz cap of a vertical diffusion furnace for manufacturing a semiconductor device is provided to extend a lifetime of a quartz cap and to stably maintain an align state of a wafer, by compensating for an etch phenomenon of a pin insertion part to be equipped with a reusable spare insertion part. CONSTITUTION: The first and second pin inserting holes(42b,42c) have different dimensions, installed on a main part of a quartz cap(40) to change an insertion position of a boat connecting pin(8) after a predetermined interval of time elapses, considering an etching phenomenon by a chemical cleaning liquid. The first and second pin hitching grooves(44a,44b) have different dimensions, installed in a flange part(44) to change an insertion position of a base material(6).