BAKE APPARATUS FOR SEMICONDUCTOR TRACK EQUIPMENT

摘要

PURPOSE: A bake apparatus for a semiconductor track equipment is provided to precisely make a wafer settled on a bake plate without a position distortion, by settling the wafer while sucking the wafer by vacuum. CONSTITUTION: A bake plate(11) heats a wafer. A plurality of elevating pins(12) has a vacuum hole(12a) on its upper surface, and is inserted into the bake plate while being capable of being elevated. A plurality of fixing pins(13) has a vacuum hole(13a) on its upper surface, and is fixed in the periphery of the elevating pins.