EQUIPMENT FOR DETACHING CHAMBER INNER SKIN OF PLASMA POLYMERIZATION APPARATUS

摘要

PURPOSE: An equipment for detaching chamber inner skin of a plasma polymerization apparatus is provided to save operation time by additionally introducing an inner skin detaching means inside a chamber, and greatly improve operation efficiency by uniting a counter electrode with an inner skin and an electrode support in a body so as to be positioned inside the chamber. CONSTITUTION: In a plasma polymerization apparatus comprising a polymerization chamber in which a discharge electrode and a counter electrode (4) are installed, an equipment for detaching chamber inner skin of a plasma polymerization apparatus consists an inner skin support part (20) which is fixed and installed at each corners of inner wall of the polymerization chamber, and a sliding guide formed on the inner skin support part (20) in which an inner skin can be inserted into the sliding guide. The sliding guide formed on the inner skin support part (20) consists a horizontal sliding guide and a vertical sliding guide so that the inner skin is positioned neighboring wall surface of up and down and left and right of the polymerization chamber.